Micro and nano fabrication : tools and processes Hans-Heinrich Gatzen; Volker Saile; Jürg Leuthold

By: Material type: TextTextPublication details: Berlin : Springer, ©2015Description: xxvi, 519p. ; illus., includes references & indexISBN:
  • 9783662443941 - hbk
Subject(s): Summary: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well
Tags from this library: No tags from this library for this title. Log in to add tags.
Star ratings
    Average rating: 0.0 (0 votes)
Holdings
Item type Current library Call number Copy number Status Date due Barcode
Books Books Kwara State University Library Main Library TK7875 .G38 2015 (Browse shelf(Opens below)) 01 Available 017949 - 01
Books Books Kwara State University Library Main Library TK7875 .G38 2015 (Browse shelf(Opens below)) 02 Available 017949 - 02


For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well

There are no comments on this title.

to post a comment.