Micro and nano fabrication : (Record no. 8314)

MARC details
000 -LEADER
fixed length control field 01028nam a22001697a 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 220413b |||||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9783662443941 - hbk
100 ## - MAIN ENTRY--AUTHOR
Author Gatzen, Hans-Heinrich
245 ## - TITLE STATEMENT
Title Micro and nano fabrication :
Remainder of title tools and processes
Statement of responsibility, etc Hans-Heinrich Gatzen; Volker Saile; Jürg Leuthold
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication Berlin :
Name of publisher Springer,
Date of publication ©2015
300 ## - COLLATION
Pagination xxvi, 519p. ; illus.,
Other physical details includes references & index
520 ## - SUMMARY, ETC.
Summary, etc <br/>For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well
650 ## - TRACINGS
Main Subject 1. Microelectromechanical systems.
650 ## - TRACINGS
Main Subject 2. Micro-Electrical-Mechanical Systems
650 ## - TRACINGS
Main Subject 3. Macrosystems électromécaniques.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Item type Books
Holdings
Source of classification or shelving scheme Not for loan Permanent location Current location Shelving location Date acquired Accession No. Full call number Barcode. Copy number Koha item type
Library of Congress Classification   Kwara State University Library Kwara State University Library Main Library 2022-04-13 017949 - 01 TK7875 .G38 2015 017949 - 01 01 Books
Library of Congress Classification   Kwara State University Library Kwara State University Library Main Library 2022-04-13 017949 - 02 TK7875 .G38 2015 017949 - 02 02 Books