Micro and nano fabrication : tools and processes
Gatzen, Hans-Heinrich
Micro and nano fabrication : tools and processes Hans-Heinrich Gatzen; Volker Saile; Jürg Leuthold - Berlin : Springer, ©2015 - xxvi, 519p. ; illus., includes references & index
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well
9783662443941 - hbk
1. Microelectromechanical systems.
2. Micro-Electrical-Mechanical Systems
3. Macrosystems électromécaniques.
Micro and nano fabrication : tools and processes Hans-Heinrich Gatzen; Volker Saile; Jürg Leuthold - Berlin : Springer, ©2015 - xxvi, 519p. ; illus., includes references & index
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well
9783662443941 - hbk
1. Microelectromechanical systems.
2. Micro-Electrical-Mechanical Systems
3. Macrosystems électromécaniques.