Micro and nano fabrication : tools and processes Hans-Heinrich Gatzen; Volker Saile; Jürg Leuthold
Material type:
TextPublication details: Berlin : Springer, ©2015Description: xxvi, 519p. ; illus., includes references & indexISBN: - 9783662443941 - hbk
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Kwara State University Library Main Library | TK7875 .G38 2015 (Browse shelf(Opens below)) | 01 | Available | 017949 - 01 | ||
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well
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