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New approaches to image processing based failure analysis of nano-scale ULSI devices / Zeev Zalevsky, Pavel Livshits, Eran Gur.

By:

Zalevsky, Zeev

Contributor(s):

Material type: Text

TextSeries: Micro & nano technologiesPublisher: Amsterdam : Elsevier/William Andrew, [2014]Copyright date: ♭2014Description: 101 pages : illustrations ; 23 cmContent type:

text

Media type:

unmediated

Carrier type:

volume

ISBN:

9780323241434
0323241433

Subject(s):

DDC classification:

621.4

LOC classification:

TK7874.76 .Z35 2014

Online resources:

Publisher description

Summary: New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.

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Holdings
Item type	Current library	Call number	Status	Barcode
Books	Kwara State University Library	TK7874 .Z35 2014 (Browse shelf(Opens below))	Available	015221-01
Books	Kwara State University Library	TK7874 .Z35 2014 (Browse shelf(Opens below))	Available	015221-02
Books	Kwara State University Library	TK7874 .Z35 2014 (Browse shelf(Opens below))	Available	015221-03

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Includes bibliographical references.

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.

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