MARC details
| 000 -LEADER |
|---|
| fixed length control field |
02146cam a22004577i 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
18206746 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20210930191638.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
140630t20142014ne a b 000 0 eng d |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
2012276394 |
| 016 7# - NATIONAL BIBLIOGRAPHIC AGENCY CONTROL NUMBER |
|---|
| Record control number |
016494197 |
| Source |
Uk |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780323241434 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0323241433 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)ocn875166733 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
IND |
| Language of cataloging |
eng |
| Transcribing agency |
IND |
| Description conventions |
rda |
| Modifying agency |
BTCTA |
| -- |
YDXCP |
| -- |
UKMGB |
| -- |
CDX |
| -- |
OCLCO |
| -- |
DLC |
| 042 ## - AUTHENTICATION CODE |
|---|
| Authentication code |
lccopycat |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7874.76 |
| Item number |
.Z35 2014 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.4 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Zalevsky, Zeev. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
New approaches to image processing based failure analysis of nano-scale ULSI devices / |
| Statement of responsibility, etc. |
Zeev Zalevsky, Pavel Livshits, Eran Gur. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Place of production, publication, distribution, manufacture |
Amsterdam : |
| Name of producer, publisher, distributor, manufacturer |
Elsevier/William Andrew, |
| Date of production, publication, distribution, manufacture, or copyright notice |
[2014]. |
| 264 #4 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Date of production, publication, distribution, manufacture, or copyright notice |
♭2014 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
101 pages : |
| Other physical details |
illustrations ; |
| Dimensions |
23 cm |
| 336 ## - CONTENT TYPE |
|---|
| Content type term |
text |
| Content type code |
txt |
| Source |
rdacontent |
| 337 ## - MEDIA TYPE |
|---|
| Media type term |
unmediated |
| Media type code |
n |
| Source |
rdamedia |
| 338 ## - CARRIER TYPE |
|---|
| Carrier type term |
volume |
| Carrier type code |
nc |
| Source |
rdacarrier |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Micro and Nano Technologies Series |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Ultra large scale integration |
| -- |
Testing. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Nanoelectronics. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics. |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Computers and IT. |
| Source of heading or term |
ukslc |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Livshits, Pavel. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Gur, Eran. |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Micro & nano technologies. |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy1606/2012276394-d.html">http://www.loc.gov/catdir/enhancements/fy1606/2012276394-d.html</a> |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| a |
7 |
| b |
cbc |
| c |
copycat |
| d |
2 |
| e |
ncip |
| f |
20 |
| g |
y-gencatlg |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Library of Congress Classification |
| Koha item type |
Books |
