New approaches to image processing based failure analysis of nano-scale ULSI devices /

Zalevsky, Zeev.

New approaches to image processing based failure analysis of nano-scale ULSI devices / Zeev Zalevsky, Pavel Livshits, Eran Gur. - 101 pages : illustrations ; 23 cm - Micro and Nano Technologies Series . - Micro & nano technologies. .

Includes bibliographical references.

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.

9780323241434 0323241433

2012276394

016494197 Uk


Integrated circuits--Ultra large scale integration--Testing.
Nanoelectronics.
Microelectronics.
Computers and IT.

TK7874.76 / .Z35 2014

621.4