New approaches to image processing based failure analysis of nano-scale ULSI devices / Zeev Zalevsky, Pavel Livshits, Eran Gur.

By: Contributor(s): Material type: TextTextSeries: Micro & nano technologiesPublisher: Amsterdam : Elsevier/William Andrew, [2014]Copyright date: ♭2014Description: 101 pages : illustrations ; 23 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9780323241434
  • 0323241433
Subject(s): DDC classification:
  • 621.4
LOC classification:
  • TK7874.76 .Z35 2014
Online resources: Summary: New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
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Item type Current library Call number Status Date due Barcode
Books Books Kwara State University Library TK7874 .Z35 2014 (Browse shelf(Opens below)) Available 015221-01
Books Books Kwara State University Library TK7874 .Z35 2014 (Browse shelf(Opens below)) Available 015221-02
Books Books Kwara State University Library TK7874 .Z35 2014 (Browse shelf(Opens below)) Available 015221-03

Includes bibliographical references.

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.

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