| 000 | 01028nam a22001697a 4500 | ||
|---|---|---|---|
| 008 | 220413b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9783662443941 - hbk | ||
| 100 | _aGatzen, Hans-Heinrich | ||
| 245 |
_aMicro and nano fabrication : _btools and processes _cHans-Heinrich Gatzen; Volker Saile; Jürg Leuthold |
||
| 260 |
_aBerlin : _bSpringer, _c©2015 |
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| 300 |
_axxvi, 519p. ; illus., _bincludes references & index |
||
| 520 | _a For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well | ||
| 650 | _a1. Microelectromechanical systems. | ||
| 650 | _a2. Micro-Electrical-Mechanical Systems | ||
| 650 | _a3. Macrosystems électromécaniques. | ||
| 942 | _cBK | ||
| 999 |
_c8314 _d8314 |
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