| 000 | 00838nam a22002655i 4500 | ||
|---|---|---|---|
| 001 | 17856165 | ||
| 003 | OSt | ||
| 005 | 20210930191740.0 | ||
| 008 | 130816s2013 pau 000 0 eng | ||
| 010 | _a 2013948203 | ||
| 020 | _a9780857095008 | ||
| 040 |
_aDLC _beng _erda _cDLC |
||
| 042 | _apcc | ||
| 245 | 0 | 0 |
_aNanolithography : _bthe art of fabricating nanoelectronic and nanophotonic devices and systems / _c[edited by] Martin Feldman. |
| 263 | _a1312 | ||
| 264 | 1 |
_aPhiladelphia, PA : _bWoodhead Pub., _c2013. |
|
| 300 | _apages cm | ||
| 336 |
_atext _2rdacontent |
||
| 337 |
_aunmediated _2rdamedia |
||
| 338 |
_avolume _2rdacarrier |
||
| 490 | 0 |
_aWoodhead publishing series in electronic and optical materials ; _vno. 42 |
|
| 906 |
_a0 _bibc _corignew _d2 _eepcn _f20 _gy-gencatlg |
||
| 942 |
_2lcc _cBK |
||
| 999 |
_c1969 _d1969 |
||