000			02146cam a22004577i 4500
001			18206746
003			OSt
005			20210930191638.0
008			140630t20142014ne a b 000 0 eng d
010			_a 2012276394
016	7		_a016494197 _2Uk
020			_a9780323241434
020			_a0323241433
035			_a(OCoLC)ocn875166733
040			_aIND _beng _cIND _erda _dBTCTA _dYDXCP _dUKMGB _dCDX _dOCLCO _dDLC
042			_alccopycat
050	0	0	_aTK7874.76 _b.Z35 2014
082	0	4	_a621.4
100	1		_aZalevsky, Zeev.
245	1	0	_aNew approaches to image processing based failure analysis of nano-scale ULSI devices / _cZeev Zalevsky, Pavel Livshits, Eran Gur.
264		1	_aAmsterdam : _bElsevier/William Andrew, _c[2014].
264		4	_c♭2014
300			_a101 pages : _billustrations ; _c23 cm
336			_atext _btxt _2rdacontent
337			_aunmediated _bn _2rdamedia
338			_avolume _bnc _2rdacarrier
490	1		_aMicro and Nano Technologies Series
504			_aIncludes bibliographical references.
520			_aNew Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
650		0	_aIntegrated circuits _xUltra large scale integration _xTesting.
650		0	_aNanoelectronics.
650		0	_aMicroelectronics.
650		7	_aComputers and IT. _2ukslc
700	1		_aLivshits, Pavel.
700	1		_aGur, Eran.
830		0	_aMicro & nano technologies.
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy1606/2012276394-d.html
906			_a7 _bcbc _ccopycat _d2 _encip _f20 _gy-gencatlg
942			_2lcc _cBK
999			_c1885 _d1885