| 000 | 01920cam a2200433 a 4500 | ||
|---|---|---|---|
| 001 | 14970465 | ||
| 003 | OSt | ||
| 005 | 20210930191557.0 | ||
| 008 | 070817m20089999nyua b 001 0 eng | ||
| 010 |
_a 2007034322 _z 2014948420 |
||
| 020 | _a9780815515555 (v. 1 : alk. paper) | ||
| 020 | _a0815515553 (v. 1 : alk. paper) | ||
| 020 | _a9781437778816 (hbk. : v. 5) | ||
| 020 | _a9781437778793 (hbk. : v. 6) | ||
| 035 | _a(OCoLC)ocn165958511 | ||
| 035 |
_a(OCoLC)165958511 _z(OCoLC)156821741 |
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| 040 |
_aDLC _cDLC _dBAKER _dBTCTA _dYDXCP _dC#P _dDLC |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTA418.7 _b.D48 2015 |
| 082 | 0 | 0 |
_a620/.44 _222 |
| 245 | 0 | 0 |
_aDevelopments in surface contamination and cleaning / _cedited by Rajiv Kohli and K.L. Mittal. |
| 260 |
_aNorwich, NY, U.S.A. : _bW. Andrew Pub., _cc2008-<2013> |
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| 300 |
_av. <1, 4-6> : _bill. (some col.) ; _c24 cm. |
||
| 500 | _aVolumes 5-<6>: First edition. | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 1 | _a[1] Fundamentals and applied aspects -- v. 4. Detection, characterization, and analysis of contaminants -- v. 5. Contaminant removal and monitoring -- v. 6. Methods of cleaning and cleanliness verification | |
| 650 | 0 |
_aSurfaces (Technology) _xInspection. |
|
| 650 | 0 |
_aSurface contamination _xPrevention. |
|
| 650 | 0 |
_aParticles _xMeasurement. |
|
| 650 | 0 | _aCleaning. | |
| 650 | 0 | _aCoatings. | |
| 650 | 0 | _aDust control. | |
| 700 | 1 |
_aKohli, Rajiv, _d1947- |
|
| 700 | 1 |
_aMittal, K. L., _d1945- |
|
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip0725/2007034322.html |
| 906 |
_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg |
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| 942 |
_2lcc _cBK |
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| 999 |
_c1819 _d1819 |
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