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	1.	Smart sensors and MEMS : intelligent devices and microsystems for industrial applications / edited by Stoyan Nihtianov and Antonio Luque. by Nihtianov, Stoyan [editor.] Luque, A. (Antonio) [editor.] Series: Woodhead Publishing series in electronic and optical materials ; 51. Material type: Text; Format: print ; Literary form: Not fiction Publisher: Oxford : Woodhead Publishing, 2014 Online resources: Publisher description Availability: Items available for loan: Kwara State University Library (3)Call number: TA165 .S62 2014, ... Place hold Add to cart (remove)
	2.	MEMS for automotive and aerospace applications / edited by Michael Kraft and Neil M. White. by Kraft, Michael White, Neil (Neil M.) Series: Woodhead Publishing series in electronic and optical materials ; no. 32. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Oxford ; Philadelphia : Woodhead Pub., c2013 Online resources: Publisher description Availability: Items available for loan: Kwara State University Library (3)Call number: TK7875 .M46 2013, ... Place hold Add to cart (remove)
	3.	Micro and nano fabrication : tools and processes Hans-Heinrich Gatzen; Volker Saile; Jürg Leuthold by Gatzen, Hans-Heinrich Material type: Text; Format: print ; Literary form: Not fiction Publication details: Berlin : Springer, ©2015 Availability: Items available for loan: Kwara State University Library (2)Call number: TK7875 .G38 2015, ... Place hold Add to cart (remove)

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