Gatzen, Hans-Heinrich <br/><br/>
Micro and nano fabrication :   tools and processes 
Hans-Heinrich Gatzen; Volker Saile; Jürg Leuthold 
 - Berlin :   Springer,  ©2015 
 - xxvi, 519p. ; illus.,  includes references & index 
<br/><br/> 	<br/>For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well 
<br/><br/><label>ISBN: </label>9783662443941 - hbk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>1. Microelectromechanical systems. <br/>2. Micro-Electrical-Mechanical Systems <br/>3. Macrosystems électromécaniques.