TY  - BOOK
AU  - Sarkar,Jaydeep
TI  - Sputtering materials for VLSI and thin film devices
SN  - 9780815515937
AV  - TS695 .S275 2014
U1  - 621.381 22
PY  - 2014///
CY  - Waltham [Mass.]
PB  - William Andrew
KW  - Microelectronics
KW  - Materials
KW  - Cathode sputtering (Plating process)
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Thin film devices
KW  - Flat panel displays
KW  - Sputtering (Physics)
N1  - Includes bibliographical references and index
ER  -