Sarkar, Jaydeep  (Materials scientist) <br/><br/>
Sputtering materials for VLSI and thin film devices / 
Jaydeep Sarkar. 
 - x, 603 pages :  illustrations ;  25 cm 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780815515937 0815515936 
<br/><br/><label>LCCN: </label>2014469441 
<br/><br/><label>Nat. Bib. No.: </label>GBB0A4559  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>015639217  Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials.<br/>Cathode sputtering (Plating process)--Materials.<br/>Integrated circuits--Very large scale integration--Materials.<br/>Thin film devices--Materials.<br/>Flat panel displays--Materials.<br/>Sputtering (Physics)
<br/><br/><label>LC Class. No.: </label>TS695  / .S275 2014 
<br/><br/><label>Dewey Class. No.: </label>621.381