Nanolithography :  the art of fabricating nanoelectronic and nanophotonic devices and systems / 
[edited by] Martin Feldman. 
 - pages cm 
 - Woodhead publishing series in electronic and optical materials ;  no. 42 .
<br/><br/><label>ISBN: </label>9780857095008 
<br/><br/><label>LCCN: </label>2013948203