TY  - BOOK
AU  - Zalevsky,Zeev
AU  - Livshits,Pavel
AU  - Gur,Eran
TI  - New approaches to image processing based failure analysis of nano-scale ULSI devices
T2  - Micro and Nano Technologies Series
SN  - 9780323241434
AV  - TK7874.76 .Z35 2014
U1  - 621.4 
PY  - 2014///]
CY  - Amsterdam
PB  - Elsevier/William Andrew
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Testing
KW  - Nanoelectronics
KW  - Microelectronics
KW  - Computers and IT
KW  - ukslc
N1  - Includes bibliographical references
N2  - New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise
UR  - http://www.loc.gov/catdir/enhancements/fy1606/2012276394-d.html
ER  -