Developments in surface contamination and cleaning / 
edited by Rajiv Kohli and K.L. Mittal. 
 - Norwich, NY, U.S.A. :  W. Andrew Pub.,  c2008-<2013> 
 - v. <1, 4-6> :  ill. (some col.) ;  24 cm. 
<br/><br/> Volumes 5-<6>: First edition. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>[1] Fundamentals and applied aspects    -- v. 4. Detection, characterization, and analysis of contaminants -- v. 5. Contaminant removal and monitoring -- v. 6. Methods of cleaning and cleanliness verification 
<br/><br/><label>ISBN: </label>9780815515555 (v. 1 : alk. paper) 0815515553 (v. 1 : alk. paper) 9781437778816 (hbk. : v. 5) 9781437778793 (hbk. : v. 6) 
<br/><br/><label>LCCN: </label>2007034322 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Surfaces (Technology)--Inspection.<br/>Surface contamination--Prevention.<br/>Particles--Measurement.<br/>Cleaning.<br/>Coatings.<br/>Dust control.
<br/><br/><label>LC Class. No.: </label>TA418.7  / .D48 2015 
<br/><br/><label>Dewey Class. No.: </label>620/.44