Smart sensors and MEMS : intelligent devices and microsystems for industrial applications / edited by Stoyan Nihtianov and Antonio Luque.

Includes bibliographical references and index.

Part I. Smart sensors for industrial applications -- What makes sensor devices and microsystems 'intelligent' or 'smart'? / R. Taymanov and K. Sapozhnikova -- Direct interface circuits for sensors / F. Reverter -- Capacitive sensors for displacement measurement in the sub-nanometer range / S. Xia and S. Nihtianov -- Integrated inductive displacement sensors for harsh industrial environments / M.R. Nabavi -- Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range / A. Gottwald and F. Scholze -- Integrated polarization analyzing CMOS image sensors for detection and signal processing / M. Sarkar and A.J.P. Theuwissen -- Advanced interfaces for resistive sensors / A. Flammini and A. Depari -- Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications / J. Sanie, E. Oruklu and S. Gilliland -- Advanced optical incremental sensors: encoders and interferometers / S.J.A.G. Cosijns and M.J. Jansen -- Part II. Smart micro-electro-mechanical systems (MEMS) for industrial applications -- Microfabrication technologies used for creating smart devices for industrial applications / J.M. Quero, F. Perdigones and C. Aracil -- Microactuators: design and technology / L. Li and Z.J. Chew -- Dynamic behavior of smart MEMS in industrial applications / M. Pustan, C. Birleanu and C. Dudescu -- MEMS integrating motion and displacement sensors / G. Langfelder and A. Tocchio -- MEMS print heads for industrial printing / S. Lee and J. Choi -- Photovoltaic and fuel cells in power MEMS for smart energy management / J. García and F.J. Delgado, and P. Ortega and S. Bermejo -- Radio frequency (RF)-MEMS for smart communication microsystems / D. Dubuc and K. Grenier -- Smart acoustic sensor array (SASA) system for real-time sound processing applications / M. Turqueti, E. Oruklu and J. Saniie.

"Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part I outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart Sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions."-- Back cover.