Sputtering materials for VLSI and thin film devices /

Sarkar, Jaydeep (Materials scientist)

Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar. - x, 603 pages : illustrations ; 25 cm

Includes bibliographical references and index.

9780815515937 0815515936

2014469441

GBB0A4559 bnb

015639217 Uk


Microelectronics--Materials.
Cathode sputtering (Plating process)--Materials.
Integrated circuits--Very large scale integration--Materials.
Thin film devices--Materials.
Flat panel displays--Materials.
Sputtering (Physics)

TS695 / .S275 2014

621.381