Sputtering materials for VLSI and thin film devices /
Sarkar, Jaydeep (Materials scientist)
Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar. - x, 603 pages : illustrations ; 25 cm
Includes bibliographical references and index.
9780815515937 0815515936
2014469441
GBB0A4559 bnb
015639217 Uk
Microelectronics--Materials.
Cathode sputtering (Plating process)--Materials.
Integrated circuits--Very large scale integration--Materials.
Thin film devices--Materials.
Flat panel displays--Materials.
Sputtering (Physics)
TS695 / .S275 2014
621.381
Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar. - x, 603 pages : illustrations ; 25 cm
Includes bibliographical references and index.
9780815515937 0815515936
2014469441
GBB0A4559 bnb
015639217 Uk
Microelectronics--Materials.
Cathode sputtering (Plating process)--Materials.
Integrated circuits--Very large scale integration--Materials.
Thin film devices--Materials.
Flat panel displays--Materials.
Sputtering (Physics)
TS695 / .S275 2014
621.381