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Silicon-on-insulator (soi) technology : manufacture and applications /

Silicon-on-insulator (soi) technology : manufacture and applications / [edited by] Oleg Kononchuk, Bich-Yen Nguyen. - pages cm - Woodhead publishing series in electronic and optical materials ; no. 58 .

ISBN: 9780857095268

LCCN: 2014936944

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